High-Speed 3-Channel Ellipsometer for Industrial Uses
نویسندگان
چکیده
منابع مشابه
Ellipsometer nulling: convergence and speed.
The process of nulling in ellipsometry is studied by a graphical presentation using the trajectories of two significant polarization states in the complex plane, (XPC) and (XSA). These states are determined by (1) the polarizer and compensator ((XPC)) and (2) the specimen and the analyzer ((XSA)) in the polarizer-compensator-specimen-analyzer ellipsometer arrangement. As the azimuth angles of t...
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This thesis explores the benefit of channel coding for high-speed backplane or chipto-chip interconnects, referred to as the high-speed links. Although both powerconstrained and bandwidth-limited, the high-speed links need to support data rates in the Gbps range at low error probabilities. Modeling the high-speed link as a communication system with noise and intersymbol interference (ISI), this...
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Beam deviation in the polarizing elements is identified as a significant source of error in existing ellipsometer alignment procedures. A high precision alignment procedure that eliminates these errors is described. This procedure is less time consuming than previous methods, and its accuracy is comparable to the limit of resolution of the ellipsometer (typically 0.01-0.005 degrees ). A further...
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ژورنال
عنوان ژورنال: Transactions of the Society of Instrument and Control Engineers
سال: 1988
ISSN: 0453-4654
DOI: 10.9746/sicetr1965.24.670